plasma etch, RIE,ICP DRIE Bosch Process
SemiStar provide the following plasma etch, RIE,ICP DRIE Bosch Process at complete, working, functional test or refurbished condition with OEM specifications, warranty and installation (optional).
PlasmaTherm 790 RIE, 2 sets
Oxford 133 RIE, 2 sets
STS ICP Multiplex, 4 sets
STS ICP Bosch Process ,3 sets
STS ICP HRM, 2 sets
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Oxford 133-SN417728
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OXFORD 100 RIE
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Computer and PLC
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Plasmatherm SLR 720
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STS Multiplex
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Tegal 901e Tegal 903e
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STS DRIE Bosch
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Upgrade Kits-Tegal
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Multiplex ICP HRM
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Cluster ICP PECVD
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STS / CPX ICP Etcher
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ICP HRM Multiplex
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STS DRIE MMPLEX
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STS ICP Multiplex
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SAMCO RIE 10 NR
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PlasmaTherm 790RIE
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Lam 4420 4520
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Technics PE-IIA
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Oxford 133 -SN-417718
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Upgrade -Branson/IPC
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Upgrade -Gasonics
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Upgrade Kits-Lam
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Upgrade Kits-Matrix
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Upgrade Kits-Tegal2
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Upgrade Kits-Tegal
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AST Barrel Asher
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Lam 490 AutoEtch
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Lam 4420 4520
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Technics PE-IIA
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Computer and PLC
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Plasmatherm SLR 720
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