AG Associates rapid thermal processors
For many years AG Associates was the dominant manufacturer of RTP systems. It was founded in 1981 and produced the first single wafer RTP system in 1982, the Heatpulse 210. In 1987, it produced the Heatpulse 610. These RTP systems run at atmospheric pressure and rely on a pre-process nitrogen or argon purge prior to wafer processing. They are still being used around the world in manufacturing, R&D and Universities. These RTP systems have a proven track record for reliability and simplicity.
Keywords: Rapid Thermal Process, Modular Process Technology, Rapid Thermal Processing, Rapid Thermal Anneal, Rapid Thermal Annealing, Rapid Thermal Oxidation, Rapid Thermal Nitride, RTA, RTP, RTO, RTN,, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment
SemiStar Corp. provide the following AG Associates rapid thermal processors at complete, working, functional test or refurbished condition with OEM specifications, warranty and installation (optional).

Heatpulse 8800i

Upgrade Kits-RTP

Heatpulse 610I

Repair Refurbish

Quartz Parts-Part No.

Heatpulse 210 RTP

Heatpulse 4100S -RTP

Heatpulse 610 -RTP

MPT RTP-3000 – 8″

Heatpulse 8800

Heatpulse 4100 RTP

Heatpulse 8108 – 8″
Heatpulse 4108
Heatpulse 410
Heatpulse 310
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