Rapid Thermal Processors at working condition

 Keywords: Rapid Thermal Process, Modular Process Technology, Rapid Thermal Processing, Rapid Thermal Anneal, Rapid Thermal Annealing, Rapid Thermal Oxidation, Rapid Thermal Nitride, RTA, RTP, RTO, RTN,, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment 

SemiStar Corp.  provide the following rapid thermal processors at complete, working, functional test or refurbished condition with OEM specifications, warranty and installation (optional).


  • Heatpulse 8800i

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  • Upgrade Kits-RTP

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  • Heatpulse 610I

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  • Jipelec Jetfirst 150

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  • Jipelec Jetfirst 200

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  • Repair Refurbish

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  • JIPELEC JETFIRST RAPID THERMAL REACTOR TYPE 100

    JETFIRST 100 -RTP

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  • AnnealSys AS-One

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  • JETFIRST 200 RTP

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  • AG Associates Heatpulse 210 Rapid Thermal Processing (2)

    Heatpulse 210 RTP

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  • AG Associates Heatpulse 4100S Rapid Thermal Processing (3)

    Heatpulse 4100S -RTP

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  • AG Associates Heatpulse 610

    Heatpulse 610 -RTP

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    • We provide professional repair service of your Brooks/PRI/Equipe robots, robot controllers, pre-aligners, and Neslab’s water recirculators, chillers, and VXI’s lamp power modules(LPM, LAMP PWR CNTL MODULE) for AG Associates Heatpulse 4100, Heatpulse 4108, Heatpulse 8108, heatpulse 8800 Rapid Thermal Processing Equipment, Rapid Thermal Processors, Rapid Thermal Annealing systems..

    Brooks Pre-Aligner

    • 001-0080-10
    • 001-0080-09
    • 1008-07
    • 4900-0006-089
    • 4900-0006-079
    • AG Associates Part Number: 4900-0006-07 / 4900-0006-08 ( Identical except switch # 2 setting on DIP switch on main board. Being in ON position, the aligner will work in parallel mode which is used on AG 4100 tools. Being in OFF position, it will work in serial mode which is used on AG 8100 and 8800 and the parallel board gets disabled and not used at all), 4900-0006-25 (an upgrade to save the LEDs life. The LED come ON only when wafer is aligning)
    • Replacement of fork pads for Brooks Pre-Aligner.

    Brooks/PRI/Equipe Pre-Alinger PRE series

    • PRE-100
    • PRE-200
    • PRE-201
    • PRE-300
    • PRE-301

    Brooks/PRI/Equipe Robot Controllers

    • ESC-100
    • ESC-200
    • ESC-212
    • ESC-204
    • ESC-208

    Brooks/PRI/Equipe Robots

    AG part numbers for Robots are 4100-0039-03 and 4100-0039-04 for Equipe/PRI ATM-100 series robots. They are interchangeable. The difference is in the z-axis pitch,which is reflected in the parameter file. So, each robot needs its own parameter file.

    VXI/Celestica LAMP PWR CNTL MODULE ,Lamp Power Module (LPM)

    • 7100-5705-089
    • 7100-5705-08

    • 7100-5705-04

    • 7100-6159-05
    • 7100-6159-01
    • 4000-1044-06
    • 4000-1044-079

    • 4000-1044-07

    Thermo Scietific/Neslab Chillers Water Recirculators/Heat Exchangers

    • System I
    • System II
    • Thermo Scietific/Neslab Systems I
    • Thermo Scietific/Neslab Systems II
    • M and W Heat Exchangers
    • Neslab’s RTE series  : Neslab RTE 1034A, Neslab RTE 211, Neslab RTE 201 etc.

    All the Heatpulse Rapid Thermal Processing , Rapid Thermal Annealing equipment  trademarks belongs to AG Associates , the original equipment manufacturer. The photo at this page is only for your reference. All rights reserved. 

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